1、 Overview and working principle of globe valve

As a key equipment in fluid control systems, globe valves are widely used in industries such as semiconductors, petrochemicals, power, pharmaceuticals, and food and beverage. Its main function is to achieve precise cutting or opening of fluids to meet the control requirements of different working conditions. Due to differences in application environments, globe valves exhibit diverse characteristics in design, material selection, and specification models.

（1） Working principle

Globe valves rely on the relative movement between the valve disc and the valve seat to achieve fluid flow. When the valve stem rotates, the valve disc rises and falls accordingly. When it moves away from the valve seat, the valve opens and the medium can flow; When the valve disc is tightly attached to the valve seat, the fluid is effectively intercepted. This control method has the characteristics of easy operation and superior sealing performance.

（2） Basic structure

Valve body: As the main body of the valve, it connects pipelines and accommodates internal components. The structural forms of the valve body include straight through type, angle type, etc. The material selection depends on the working conditions. For example, cast steel or forged steel is often used in high temperature and high pressure environments, while stainless steel or engineering plastics are used in corrosion-resistant environments.

Valve cover: It seals the top of the valve body to protect internal components. The connection methods include flange connection, threaded connection, and welding to adapt to different pressure and temperature requirements.

Valve stem: connects the actuator and the valve disc, drives the valve disc to move through rotation, requires sufficient rigidity and strength, and maintains good straightness and surface smoothness to improve sealing and operational stability.

Valve disc: directly in contact with the medium, controlling the on/off of the fluid. Its shapes are diverse, such as flat plate shape, plunger shape, streamline shape, etc., to meet different flow control needs.

Sealing components: including valve seat sealing surface and valve stem sealing device, ensuring the sealing performance of the valve. Sealing materials can be divided into metal seals and non-metal seals. The former is resistant to high temperature and high pressure, while the latter has good flexibility and is suitable for corrosive media. The common methods of valve stem sealing include packing sealing and bellows sealing, among which bellows sealing can achieve zero leakage and is suitable for the semiconductor and pharmaceutical industries.

2、 Application of globe valves in the semiconductor industry

（1） Application environment characteristics and special requirements

Semiconductor manufacturing has extremely high requirements for environmental cleanliness, and tiny particle pollution may lead to decreased product performance or damage. Therefore, globe valves suitable for the semiconductor industry need to have ultra-high cleanliness, with specially treated internal surfaces to prevent particle detachment.

In addition, the semiconductor production process requires extremely high precision in fluid flow control, and the shut-off valve needs to have high-precision adjustment capability to ensure the stability and consistency of the process. At the same time, valves need to have fast response characteristics to accurately control the on/off of fluids during process transitions.

（2） Common models and technical parameters of globe valves

Swagelok SS-400 series

Specification: The nominal diameter range is 1/8 "-1", suitable for pipeline connections in semiconductor manufacturing.

Technical parameters: Leakage rate as low as 10??  std cm3/s He， Ensure that the medium is leak free. The maximum working pressure can reach 68.95 MPa (10000 psi), suitable for various gas delivery systems. The switch response time is as short as milliseconds, meeting the requirements of efficient production.

WODE VSS series

Specification: Covering 1/8 "-1" caliber, providing VCR, sleeve, thread and other connection methods, suitable for different pipeline systems.

Technical parameters: Can the leakage rate be as low as 10? 11 std cm3/s He， Ensure ultra-high sealing performance. Suitable temperature range -40 ℃ to 350 ℃, meeting various temperature conditions. Design optimized flow coefficient (Cv value) to improve flow control performance while ensuring sealing.

（3） Typical application scenarios

Lithography process: Precise control of the supply of lithography gas is required during the lithography process. The shut-off valve is used to regulate the flow rate of the pipeline, ensuring that the lithography gas enters the equipment at the optimal time to ensure the accuracy and consistency of the pattern.

Etching process: In the etching process, corrosive gases are used to treat the surface of silicon wafers. The shut-off valve, with its high cleanliness and corrosion resistance, prevents pollutants from entering the system while ensuring long-term stable operation.

Wet process technology: Flow control of chemical reagents is crucial in cleaning, developing, and other processes. Semiconductor specific shut-off valves can accurately regulate the transportation of chemicals, ensuring the efficiency and safety of the processing process.

The application of globe valves in the semiconductor industry is crucial, as they need to meet requirements such as high cleanliness, precise flow control, high sealing, and fast response. With the continuous upgrading of semiconductor manufacturing processes, technological innovation in globe valves is also being continuously promoted to adapt to more stringent production environments, improve production efficiency and product quality.